PS5
Advanced Metrology and Inspection
Cubic Convergent Reconstruction Algorithm for Fourier Ptychography Microscope
Tuo Yin, Gookho Song, Jaeyeon Oh, *Mooseok Jang (Department of Bio and Brain Engineering, KAIST)
Comparative analysis of Model-base & Model-less TSOM method for semiconductor, display metrology
주지용, 이정빈, 박지원, *이준호 (공주대학교)
Material-specific nano-imaging of line-patterned silicon-based substrates using super-resolution fluorescence microscopy
Uidon Jeong, *Doory Kim (Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea)
Research on TSOM Data Tendency by Position of Embedded Defect in 3D NAND Structure
Ji Won Park, *Jun Ho Lee, Ji Yong Joo, Jung Bin Lee, Do Hee Kim (KONGJU NATIONAL UNIVERSITY)
Optical Design of High-Resolution DUV Objective lens for Semiconductor Inspection equipment(반도체 검사장비용 고분해능 심자외선 대물렌즈 광학설계)
Do Hee Kim, *Jun Ho Lee, Jung Bin Lee, Ji Won Park, Seok Young Ju (Kongju National University)
High-resolution on-chip microscopy using LED matrix
Jongin You, Gookho Song, *Mooseok Jang (Korea Advanced Institute of Science and Technology)
Non destructive defect penetration depth estimation via model-less NIR TSOM
Lee Jung Bin, Ji Yong Joo, Do Hee Kim, Ji Won Park, *Jun Ho Lee (Kongju National University)
Holographic imaging based on physics-informed style transfer network
Chanseok Lee, *Mooseok Jang (KAIST)
플렌옵틱 광학계 마이크로 렌즈 어레이 배열 변화를 통한 공간분해능 변화 연구
한석기, *이준호, 장관우, 연하늘 (공주대학교)
단일 초점 및 다중 초점 MLA 모델링을 통한 플렌옵틱 DOF 비교 분석
Gwan Woo Jang, *Jun Ho Lee, Seok Gi Han, Ha Neul Yeon (Dept. of Optical Eng., Kongju National Univ.)
Spatial resolution enhancement of dynamic spectroscopic imaging ellipsometry
Sukhyun CHOI (Jeonbuk National University / Korea Research Institute of Standards and Science), *Daesuk KIM (Jeonbuk national university)
Plenoptic 1.0 and 2.0 Spatial Resolution Comparative Analysis through Modeling
Ha Neul Yeon, *Jun Ho Lee, Gwan Woo Jang, Seok Gi Han (Kongju National University)
A Study on the Electrode-Insulator Structure of Microcolumn
Youngbok Lee, Hyungwoo Kim, Dae Wook Kim, Seung Joon Ahn, Tae Sik Oh, *Ho Seob Kim (Sun Moon University)
Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices
Kwangrak Kim, Soonyang Kwon, Jangryul Park, Youngsun Choi, Jiwoong Kim, *Myungjun Lee, Changhoon Choi (Samsung Electronics)
Advanced AFM Defect Review in Semiconductor Application with Chemical Information
Jinyoung Na, Ahjin Jo, Byoung-Woon Ahn, *Sang-Joon Cho (Park Systems)
Technological Convergence between AFM and WLI for Industrial AFM Applications
Minjeung Lee, Ahjin Jo, Byoung-Woon Ahn, *Sang-Joon Cho (Park Systems)
