2022 차세대 리소그래피 학술대회

2022 Next Generation Lithography Conference

The Next Decade Visioning for Lithography

Aug. 17 (Wed.) ~ 18 (Thu.), 2022
Suwon Convention Center, Suwon-si, Gyeonggi-do, Korea
Accompanying Event: ASML TechTalk [Aug. 19 (Fri.), 2022]
Session Track
Program at a Glance
PS4
Alternative Lithography & Algorithmic Molecular Patterning and Optical Device (Joint Session)

PS4-01
Method for enhancing the patterning speed and precision in DMD-based maskless lithography
최진수 (한국과학기술원), 김기홍, 이원섭, 조현민, 장원석 (한국기계연구원), *유홍기 (한국과학기술원)
Abstract
PS4-02
A Study on Laser Direct Patterning of Liquid Metals for Flexible Electronics
Su-Jeong Park (KITECH / Hanyang Univ.), Seong Ju Park, Kim Inae, *Chanwoo Yang (KITECH)
Abstract
PS4-03
반데르 발스 힘을 이용한 콜로이드 자기 조립 방법
Cho Yongdeok, Kwon Min, Sung Hun Park, *Seungwoo Lee (Korea University)
Abstract
PS4-04
Design of DNA origami crystals and their applications
박성훈, *이승우 (고려대학교)
Abstract
PS4-05
Large-area and crack-free gold monolayer via ligand exchange with polymer brush
김나연, 허지혁, *이승우 (KU-KIST Graduate School of Converging Science and Technology, Korea University)
Abstract