2022 차세대 리소그래피 학술대회

2022 Next Generation Lithography Conference

The Next Decade Visioning for Lithography

Aug. 17 (Wed.) ~ 18 (Thu.), 2022
Suwon Convention Center, Suwon-si, Gyeonggi-do, Korea
Accompanying Event: ASML TechTalk [Aug. 19 (Fri.), 2022]
Session Track
Program at a Glance
PS2
Immersion Lithography

PS2-01
A Study on the Correlation between Resolution and Depth of Focus in ArF immersion 
Chae-Hwan Kim, Jungchul Song (National Nano Fab Center), *Ga-Won Lee (Chungnam Natioanl University)
Abstract