2022 차세대 리소그래피 학술대회

2022 Next Generation Lithography Conference

The Next Decade Visioning for Lithography

Aug. 17 (Wed.) ~ 18 (Thu.), 2022
Suwon Convention Center, Suwon-si, Gyeonggi-do, Korea
Accompanying Event: ASML TechTalk [Aug. 19 (Fri.), 2022]
Session Track
Program at a Glance
August 18(Thu)
PM-I
Patterning Materials I
401/402,
13:00~14:30 KST
좌장: 이진균(인하대)
PM-I-1
13:00~13:30
Sn-based EUV Photoresist for ultra-fine nanopatterns
*Ji-Hyun Jang (UNIST)
Abstract
PM-I-2
13:30~14:00
Photolithography Process using Fluorinated Patterning Materials for OLED Displays
*Byung Jun Jung (University of Seoul), Jin-Kyun Lee (Inha University)
Abstract
PM-I-3
14:00~14:30
Directed Molecular Self-Assembly via Photo-Thermal Process
*Hyeong Min Jin (Chungnam National University)
Abstract