2022 차세대 리소그래피 학술대회

2022 Next Generation Lithography Conference

The Next Decade Visioning for Lithography

Aug. 17 (Wed.) ~ 18 (Thu.), 2022
Suwon Convention Center, Suwon-si, Gyeonggi-do, Korea
Accompanying Event: ASML TechTalk [Aug. 19 (Fri.), 2022]
Session Track
Program at a Glance
August 17(Wed)
AL/AM-I
Alternative Lithography & Algorithmic Molecular Patterning and Optical Device I (Joint Session)
404,
09:00~10:30 KST
좌장: 이승우(고려대)
AL/AM-I-1
09:00~09:30
Block-copolymer self-assembly-based nano-patterns with controlled complexity
*Seok Joon Kwon (Sungkyunkwan University)
Abstract
AL/AM-I-2
09:30-10:00
DNA-based self-assembly towards programmable nanoscale patterning
*Sungwook Woo (Pohang University of Science and Technology)
Abstract
AL/AM-I-3
10:00~10:30
Microparticle-based Patterning and Fabrication of Deformable Devices
*Unyong Jeong (POSTECH)
Abstract